[labnetwork] heat load of MA6 mask aligner and Oxford RIE 80

[Quinn Leonard]

The installation requirements for our MA6 say, "max power requirement 2.5 kW (BA mode max 1 kW)".

On 3/1/2019 9:01 AM, Christian Pfluegl wrote:
Dear colleagues,

We are planning to setup a Karl Suess MA6 maskaligner and a small Oxford RIE 80 in our facility.

Does anyone know what the heat loads of those systems are (both idling and operating)?

The Oxford manual says 1.5kW when idling but I am not sure how they arrive at such a high value when the RF is off.

Thanks,

Christian

Dr. Christian Pfluegl
Pendar Technologies LLC
tel.: (857) 413-9339
www.pendartechnologies.com<http://www.pendartechnologies.com>


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--
Quinn Leonard
Technical Staff
Nanoscale Fabrication Center
University of Wisconsin

Room 3112 Engineering Centers Building
1550 Engineering Drive
Madison, WI 53706

(608) 890-3030
qleonard at wisc.edu<mailto:qleonard at wisc.edu>
https://wcnt.wisc.edu/
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