[labnetwork] Clean room / Nanofab temp/

[Iulian Codreanu]

Hi Patrick,

My systems meet 68 +/- 0.5 degF year round.

When it comes to humidity they achieve the equivalent of 45 +/-2 %RH 
during the humidification and dehumidification seasons. I am working on 
achieving that during the "shoulder seasons" as well. I control to 
dewpoint (rather than relative humidity) because it has more physical 
meaning.

Good luck,

Iulian

iulian Codreanu, Ph.D.
Director of Operations, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu

On 3/18/2019 3:08 PM, Johnson, Patrick wrote:
>  Hello Colleagues,  what do the other NanoFabs basically have there 
> cleanrooms temp and humidity specs set at? I have been in 
> Semiconductor since 1995 and 67F +/- 1 degree and humidity 45-47%  is 
> what I have encountered.  I appreciate any input from  the LabNetwork 
> partners.  Thanks Patrick
> */Patrick Johnson/*
> /George Washington University/
> /Nano Fabrication Lab Manager /
> /Science and Engineering Hall/
> /800 NW 22nd Street Rm-B2815/
> /Washington D.C. 20052/
> /Cell 703 258 2465/
> /Desk 202 994 2346/
>
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