[labnetwork] Clean room / Nanofab temp/

[Nibarger, John (Fed)]

We’re at 68.5 deg +/- 0.5 deg and 40% +/- 5%.
- John

John P. Nibarger, Ph.D.
Manager, Boulder Micro-fabrication Facility
Microfabrication Group Leader (687.10)
National Institute of Standards and Technology
325 Broadway, MS 687.10
Boulder, CO  80305
303-497-4575 (phone)
303-497-3042 (fax)
john.nibarger at nist.gov<mailto:john.nibarger at nist.gov>


From: <labnetwork-bounces at mtl.mit.edu> on behalf of Matthew Moneck <mmoneck at andrew.cmu.edu>
Date: Tuesday, March 19, 2019 at 5:42 AM
To: "Johnson, Patrick" <paj1 at email.gwu.edu>, "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Clean room / Nanofab temp/

Hi Patrick,

Our systems are set to target 68 deg +/- 0.5 deg and 40% +/- 1%.

Best Regards,

Matt

--
Matthew T. Moneck, Ph.D.
Executive Manager, Claire & John Bertucci Nanotechnology Laboratory
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave., Pittsburgh, PA 15213-3890
T: 412.268.5430
F: 412.268.3497
www.ece.cmu.edu<https://gcc01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.ece.cmu.edu%2F&data=02%7C01%7Cjohn.nibarger%40nist.gov%7Cb687257dc7b844fc327008d6ac5ff317%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C636885925445994392&sdata=sO7%2BNbKhxQcC5lsj6wRHyZjsBWuYRjytVvX3UFjN0YU%3D&reserved=0>
nanofab.ece.cmu.edu

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Johnson, Patrick
Sent: Monday, March 18, 2019 3:08 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Clean room / Nanofab temp/

 Hello Colleagues,  what do the other NanoFabs basically have there cleanrooms temp and humidity specs set at?  I have been in Semiconductor since 1995 and 67F +/- 1 degree and humidity 45-47%  is what I have encountered.  I appreciate any input from  the LabNetwork partners.  Thanks Patrick
Patrick Johnson
George Washington University
Nano Fabrication Lab Manager
Science and Engineering Hall
800 NW 22nd Street Rm-B2815
Washington D.C. 20052
Cell 703 258 2465
Desk 202 994 2346
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