[labnetwork] Sputtering Fluorine Doped SnO2
jtk1
jtk1 at rice.edu
Tue May 21 23:34:37 EDT 2019
Hello All,
We have a user that is asking about sputtering fluorine doped SnO2. I
think any SnO2 from Kurt Lesker should be should sputter as well as
ITO, but I don't know about the fluorine doping part. That is a new
one for me.
Does anyone have any experience with FTO?
The user seems inclined to even make their own targets somehow and
then sputter them. Does anyone have experience with home-made sputter
targets?
Sincerely,
James Kerwin
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