[labnetwork] Gas exhaust

[Mark Heiden]

Hi Shane,
Our lab setup  is very similar to that described by Iulian except we don’t have POU scrubbers. We do however have toxic gas monitors in all exhaust streams and in 15 years they have never measured a detectable amount to trigger an alarm. My guess is that would be the first sign that we had any kind of risk.


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551
https://nanofab.ucr.edu/



From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Iulian Codreanu
Sent: Wednesday, November 06, 2019 9:41 AM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Gas exhaust

Hi Shane,

Our PECVD pump's exhaust goes through a scrubber on its way to a teflon-coated stainless steel exhaust system.

We have a "solvent" exhaust system (stainless steel) and a "corrosive" exhaust system (teflon-coated stainless steel).

It's easy to connect fume hoods to the "proper" exhaust system. It's not so easy for tools (because they use combinations of types of gases) so we tend to connect the etchers and the CVD tools to the corrosive system. The teflon-coated system offers both corrosion protection (through the teflon coating) and fire protection (through the stainless steel). As I mentioned at the beginning, we use point of use abatement on those tools as an added measure.

Iulian


iulian Codreanu, Ph.D.

Director, Nanofabrication Facility

University of Delaware

Harker ISE Lab, Room 163

221 Academy Street

Newark, DE 19716

302-831-2784

http://udnf.udel.edu
On 11/6/2019 9:01 AM, Xin (Shane) Guo wrote:
Hi Colleagues,

We are trying to set up a dual chamber PECVD-RIE system. Our internal team has concerns of mixed fumes sharing the same exhaust. The gases involve NH3(in a gas cabinet), N2, O2, Ar, He, SF6, CHF3, CF4, TEOS and DES (vapor draw), though it should be only traces of the waste gases going into the exhaust.

Can you share what your practice is in your facility? Do you use separate exhaust for different groups of gases? What is the best place to find the guideline or regulation of such thing?

Best

Shane



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