[labnetwork] Gas exhaust

[Iulian Codreanu]

Hi Shane,

Our PECVD pump's exhaust goes through a scrubber on its way to a 
teflon-coated stainless steel exhaust system.

We have a "solvent" exhaust system (stainless steel) and a "corrosive" 
exhaust system (teflon-coated stainless steel).

It's easy to connect fume hoods to the "proper" exhaust system. It's not 
so easy for tools (because they use combinations of types of gases) so 
we tend to connect the etchers and the CVD tools to the corrosive 
system. The teflon-coated system offers both corrosion protection 
(through the teflon coating) and fire protection (through the stainless 
steel). As I mentioned at the beginning, we use point of use abatement 
on those tools as an added measure.

Iulian

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu

On 11/6/2019 9:01 AM, Xin (Shane) Guo wrote:
> Hi Colleagues,
>
> We are trying to set up a dual chamber PECVD-RIE system. Our internal 
> team has concerns of mixed fumes sharing the same exhaust. The gases 
> involve NH3(in a gas cabinet), N2, O2, Ar, He, SF6, CHF3, CF4, TEOS 
> and DES (vapor draw), though it should be only traces of the waste 
> gases going into the exhaust.
>
> Can you share what your practice is in your facility? Do you use 
> separate exhaust for different groups of gases? What is the best place 
> to find the guideline or regulation of such thing?
>
> Best
>
> Shane
>
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