[labnetwork] Bulkhead between cleanroom and regular service room

Wang, Lei lei.z.wang at yale.edu
Fri Nov 8 14:19:59 EST 2019


Dear Colleagues,

We are working on cleanroom expansion, but might with a regular service room. Does anyone have experience with bulkhead method between cleanroom and 'dirty' service room?

The front of our new e beam evaporator will sit in cleanroom, but the back might be in a regular service room. Anyone knows is there any issue for this wall mount method? Do we need to seal all the gaps to avoid the contamination coming from the service room? Is the vibration a big problem when the system is running?

All suggestions and comments are welcome.
Thank you so much.

Lei

Lei Wang, Ph.D.
Yale West Campus Cleanroom
750 West Campus Drive
West Haven, CT, 06516
lei.z.wang at yale.edu
203-737-6579

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