[labnetwork] ALD availability in the midwest

[Ferraguto, Thomas S]

We have a Cambridge Nano (Veeco) Fiji (with low temp plasma capability) and an 8" platen.

All of the required materials. Unfortunately we're in Lowell MA. But we would be happy to provide service.



Best Regards


Thomas S. Ferraguto
Saab ETIC Nanofabrication Laboratory Director
Saab ETIC Building Director
1 University Avenue
Lowell MA 01854
Mobile 617-755-0910
Land 978-934-1809
Fax 978-934-1014



From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Shepard, Jeremiah J
Sent: Monday, August 10, 2020 9:04 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ALD availability in the midwest

This e-mail originated from outside the UMass Lowell network.
________________________________
All,
Good morning!  I am an engineer with Purdue's Birck Nanotechnology fab.  Our ALD system has went down and will be down for several weeks.  I am looking for alternatives for our researchers to use until our system comes back online.  We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail.

Our system is equipped with AlOx, HfOx,  and SiOx.  The majority of our users are growing AlOx and HfOx.  We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness.  We also have many users growing at more traditional 200 C temps.  I would expect work coming from our fab to fall within these parameters.

Any leads would be greatly appreciated!

Thank you,
Jerry Shepard

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