[labnetwork] ALD availability in the midwest

[Tony L Olsen]

Jerry

I'm a little further away, but I have a Cambridge Fiji200 with each of these films as standard processes.  I'm certainly willing to help.

tonyO


Tony Olsen
Nanofab Cleanroom Supervisor/Process Engineer
University of Utah
36 S Wasatch Drive, Suite 2500
Salt Lake City, UT  84112
801-587-0651
www.nanofab.utah.edu



From: Shepard, Jeremiah J <jshepar at purdue.edu>
Sent: Monday, August 10, 2020 07:04
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ALD availability in the midwest

All,
Good morning!  I am an engineer with Purdue's Birck Nanotechnology fab.  Our ALD system has went down and will be down for several weeks.  I am looking for alternatives for our researchers to use until our system comes back online.  We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail.

Our system is equipped with AlOx, HfOx,  and SiOx.  The majority of our users are growing AlOx and HfOx.  We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness.  We also have many users growing at more traditional 200 C temps.  I would expect work coming from our fab to fall within these parameters.

Any leads would be greatly appreciated!

Thank you,
Jerry Shepard

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