[labnetwork] Porous Silicon Etch Wet Bench
Aebersold,Julia W.
julia.aebersold at louisville.edu
Thu Dec 3 16:27:54 EST 2020
I've made porous silicon at our electroplating bench. No need to install a new bench. Just make sure it can handle 49% HF.
Cheers!
Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
2210 South Brook Street
Shumaker Research Building, Room 233
Louisville, KY 40292
(502) 852-1572
http://louisville.edu/micronano/<http://louisville.edu/micronano>
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From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Ferraguto, Thomas S <Thomas_Ferraguto at uml.edu>
Sent: Thursday, December 3, 2020 12:36 PM
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Subject: [labnetwork] Porous Silicon Etch Wet Bench
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Colleagues,
Does anyone have a “Porous Silicon Wet Bench Station”? for either foundry or self-use?
I have a customer that wanted to place a “Porous Silicon Etching” wet bench in my clean room.
I don’t have the room and the engineering cost alone for the install makes in prohibitive.
Please let me know if you know any availability of such a system.
Best Regards
Thomas S. Ferraguto
Saab ETIC Nanofabrication Laboratory Director
Saab ETIC Building Director
1 University Avenue
Lowell MA 01854
Mobile 617-755-0910
Land 978-934-1809
Fax 978-934-1014
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