[labnetwork] Cleanroom training policies + COVID guidelines

Wed Dec 16 16:52:24 EST 2020

Hi Jim,

We have started to do training on some pieces of equipment and been mostly successful so far. Our previous protocol usually involved an initial training session (sometimes grouped with 1-2 others trainees) to see the equipment use through a typical run. This was followed by a check-off session supervised by the tool owner with the user running one of their own samples through the system. This required a lot of close contact of course and was sometimes unnecessarily complex.

Our new training guidelines mostly follow the model below, although there are slight variations based on the specific tool:

  1.  Viewing a video recording of a typical run. This is most often scripted right off of the initial trainings sessions we originally provided in person. The users are also asked to read-through our op specs for the tool during this time.
  2.  The next step is most often a 30 minute video chat with the tool owner. This is a combination of a knowledge check, a Q&A session, and a brief process review to see if there is anything specific to their process that the video or op spec may not have covered.
  3.  A socially distanced check off session. The goal here is to limit any close contact, although realistically this rule gets bent sometimes depending on the comfort levels of the staff and users.
     *   For the check off we have had the users run a "standard" process rather than their own sample. They are given a rough checklist to follow with break points on any steps where the staff member would need to physically check any positioning, parameters, etc. While the user is running the staff is usually within sight distance and available if needed, but is otherwise hands-off. Whenever a break point is reached the user calls over the staff member for a check and then the process continues.

For the most part this has worked well. It is obviously much more conducive to some processes than others. Training on our maskless aligner, evaporators, PECVD, and etchers, have all worked out well. Things like photolithography, wet chemical work, SEM, etc. have been slower to turn on because they often require much more interaction and are more difficult while remaining distanced. We have considered doing live zoom/phone calls to enable remote communication live during a training or checkoff but have not implemented it to a large degree yet.

By far the biggest challenge is communication in the cleanroom. It is quite loud and we have found that even routine conversations end up being shouted from a close distance in order to effectively be heard. That is why we have moved as much as we can remotely and also tried to even limit interactions or question & answer during the in-person checkoff. The beneficial (in my opinion) side effect of this is that it forces the users to be much more self-reliant during the checkoff. Instead of simply turning to the staff member and being guided through the process they must know or be able to find the information they need themselves. In my opinion this will make them much more effective lab users overall since the vast majority of their processing time is going to be independent of staff intervention.

-Dave

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Vlahakis, James
Sent: Wednesday, December 16, 2020 14:10
To: Iulian Codreanu <codreanu at udel.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Cleanroom training policies + COVID guidelines

This conversation has been very helpful, thank you to those who have posted their thoughts/experiences.

Iulian's comment was particularly interesting -
During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods).

Here at Tufts we are unable to train new users - adhering to our COVID guidelines while training users is not possible. It would be useful to understand what others are doing so a few questions for the group - Are you providing in-lab training? If so, what accommodations are in place? Do you have defined metrics for tightening or loosening restrictions?

If I can present plan(s) that other universities have successfully employed perhaps I can convince our OVPR to permit certain training functions

jim

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Iulian Codreanu
Sent: Wednesday, December 16, 2020 10:26 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Question about cleanroom mask policies

Hi Robert,

At Delaware we ask the users to bring their personal face mask (they have to wear it to enter the building anyway) to the gowning room and cover it with a beard cover. This has worked well since we re-opened in the middle of June; the face mask is meant to help with the virus and the beard cover with the lab cleanliness. During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods).

Happy Holidays to Everyone!

Iulian

iulian Codreanu, Ph.D.

Director, Nanofabrication Facility

University of Delaware

Harker ISE Lab, Room 163

221 Academy Street

Newark, DE 19716

302-831-2784

http://udnf.udel.edu<https://urldefense.com/v3/__http:/udnf.udel.edu__;!!KGKeukY!jQbNVO-JRmC_zNbAtqxobNLNd7GlVG6O0xs0xkEHvNpF2HlUfWgHOl2lYt2FICk3Pwk8dg$>
On 12/16/2020 3:07 AM, Shimon Eliav wrote:
Hi Robert,

When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers.
Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary.

Today our policy is: every user comes with his/her own mask and must put the face cover over it. This "two layers" solution is more than enough inside the clean room (plus as much distancing is possible).

Regards,

Shimon
The Hebrew University of Jerusalem
The Unit for Nano Fabrication
Jerusalem - Israel

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen
Sent: Tuesday, 15 December 2020 19:29
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Question about cleanroom mask policies

Hi all.
Hope this finds everyone safe.
Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge.
So far we have just been wearing the standard cleanroom style masks.
Just wondering what other labs have been using.

Thanks
Robert Vandusen
Technical Officer, Microfabrication Lab
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-2600<tel:613-520-2600> ext 5761
Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>

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