[labnetwork] SCS Labcoater 2 parylene system

[Hayes, Matthew David]

Very good information!
After your input, I’m thinking the difference in some of our users films (cloudy) and when I do a run (clearer) is that they may be starting run with too much or wet Micro 90 in the chamber.

Thanks for your input!


Matthew D Hayes
Engineering Technician
Birck Nanotechnology Center
Purdue University
765-494-6522
hayes186 at purdue.edu<mailto:hayes186 at purdue.edu>



From: Chito Kendrick <cekendri at mtu.edu>
Sent: Tuesday, January 7, 2020 1:28 PM
To: Hayes, Matthew David <hayes186 at purdue.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] SCS Labcoater 2 parylene system

I follow the process outlined in the manual pretty closely for our system.

1. Treating the chamber with Micro90 to help release the parylene, spray all parts and then wipe off excess pooling of Micro90
2. Peeling off any parylene that is bubbling or may come off during pump down. For the thickness we normally do this is after every run. Mainly using plastic tweezers to help peel off the film in one sheet and then rubbing with a cleanroom wipe soaked with the Micro90 solution to help remove anything still stuck, if it does not come off then we assume it will not peel off layer during pumping.
3. We also do regular pump oil changes and removal of the flex line from the chamber to the cold finger to peel out any build up that can not be accessed with it on the system
4. Recently we had to drill out the baffle to clear a blockage in baffle tubing, it caused a build up of parylene in the vaporizer as the vapor flow was restricted
5. We are getting to the point where I will have to replace the stage as the coating is too rough to peel off. Several screws on our rotating plate are so bound up with parylene I am going to have to drill out the screws and retap them to completely clean some parts.

The only cloudy films we have had I have associated to a bad base pressure or the micro90 has not completely dried.

Chito Kendrick


On Tue, Jan 7, 2020 at 12:47 PM Hayes, Matthew David <hayes186 at purdue.edu<mailto:hayes186 at purdue.edu>> wrote:
Hello all!

I’m interested in hearing how others are cleaning the chambers in these systems. Including:


  1.  Cleaning after every run or at some interval?
  2.  Procedures used to clean?
  3.  Using Micro 90 on chamber surfaces to promote removal of parylene film?

Also, some users will get a cloudy film. Could this be from too thick of coating of Micro 90? Usually, I’ll check vacuum then run a deposition of my own and the film looks better than the users.

Matthew D Hayes
Engineering Technician
Birck Nanotechnology Center
Purdue University
765-494-6522
hayes186 at purdue.edu<mailto:hayes186 at purdue.edu>

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Managing Director of the Microfabrication Facility
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