[labnetwork] SCS Labcoater 2 parylene system

[Chito Kendrick]

In the manual I looked at there is several pieces of information on cloudy
coatings:

1 - The vacuum controller set point value is factory-set at 15 units above
base pressure. By changing this setting up or down, the process will speed
up or slow down respectively. Take care not to set this value too high, as
it will result in cloudy coatings

2 - Generally, the slower the deposition, the more uniform and clear the
Parylene will be. From the standpoint of coating quality, you cannot coat
too slowly, but coating too quickly can cause cloudy or whitish Parylene
and uneven coating thickness. For Parylene C, the deposition rate will
typically be about .0002" per hour

3 - It is best to distribute the substrate evenly within the Deposition
Chamber. Relatively large spaces with little or no surface area will tend
to result in Parylene coating that is cloudy.


On Tue, Jan 7, 2020 at 3:25 PM Hayes, Matthew David <hayes186 at purdue.edu>
wrote:

> Very good information!
>
> After your input, I’m thinking the difference in some of our users films
> (cloudy) and when I do a run (clearer) is that they may be starting run
> with too much or wet Micro 90 in the chamber.
>
>
>
> Thanks for your input!
>
>
>
>
>
> *Matthew D Hayes*
>
> Engineering Technician
>
> Birck Nanotechnology Center
>
> Purdue University
>
> 765-494-6522
>
> hayes186 at purdue.edu
>
>
>
>
>
>
>
> *From:* Chito Kendrick <cekendri at mtu.edu>
> *Sent:* Tuesday, January 7, 2020 1:28 PM
> *To:* Hayes, Matthew David <hayes186 at purdue.edu>
> *Cc:* labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] SCS Labcoater 2 parylene system
>
>
>
> I follow the process outlined in the manual pretty closely for our system.
>
>
>
> 1. Treating the chamber with Micro90 to help release the parylene, spray
> all parts and then wipe off excess pooling of Micro90
>
> 2. Peeling off any parylene that is bubbling or may come off during pump
> down. For the thickness we normally do this is after every run. Mainly
> using plastic tweezers to help peel off the film in one sheet and then
> rubbing with a cleanroom wipe soaked with the Micro90 solution to help
> remove anything still stuck, if it does not come off then we assume it will
> not peel off layer during pumping.
>
> 3. We also do regular pump oil changes and removal of the flex line from
> the chamber to the cold finger to peel out any build up that can not be
> accessed with it on the system
>
> 4. Recently we had to drill out the baffle to clear a blockage in baffle
> tubing, it caused a build up of parylene in the vaporizer as the vapor flow
> was restricted
>
> 5. We are getting to the point where I will have to replace the stage as
> the coating is too rough to peel off. Several screws on our rotating plate
> are so bound up with parylene I am going to have to drill out the screws
> and retap them to completely clean some parts.
>
>
>
> The only cloudy films we have had I have associated to a bad base pressure
> or the micro90 has not completely dried.
>
>
>
> Chito Kendrick
>
>
>
>
>
> On Tue, Jan 7, 2020 at 12:47 PM Hayes, Matthew David <hayes186 at purdue.edu>
> wrote:
>
> Hello all!
>
>
>
> I’m interested in hearing how others are cleaning the chambers in these
> systems. Including:
>
>
>
>    1. Cleaning after every run or at some interval?
>    2. Procedures used to clean?
>    3. Using Micro 90 on chamber surfaces to promote removal of parylene
>    film?
>
>
>
> Also, some users will get a cloudy film. Could this be from too thick of
> coating of Micro 90? Usually, I’ll check vacuum then run a deposition of my
> own and the film looks better than the users.
>
>
>
> *Matthew D Hayes*
>
> Engineering Technician
>
> Birck Nanotechnology Center
>
> Purdue University
>
> 765-494-6522
>
> hayes186 at purdue.edu
>
>
>
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>
>
>
> --
>
> Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>
>
> Managing Director of the Microfabrication Facility
> Research Assistant Professor
> Electrical and Computer Engineering
> Michigan Technological University
> Room 436 M&M Building
> 1400 Townsend Dr.
> Houghton, Michigan 49931-1295
>
> 814-308-4255
>


-- 
Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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