[labnetwork] Plumbing new gases in ICP-RIE gas pod

[Kevin M McPeak]

Dear Colleagues,

Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford ICP100 system. The gas pod (see attached photo) currently has the following gases plumbed from top to bottom: O2, N2, CF4, and SF6. Notice, the current CF4 and SF6 lines have additional valves and plumbing. 

When I add the C4F8 and CHF3 do you recommend I plumb them like the O2 and N2 gases (filter -> MFC -> valve) are or do I need to add the additional valves and plumbing like the SF6 and CF8 lines are? We can do either but the SF6/CF4 method is a lot more money and time. This is an old gas pod, circa 1995 and Oxford has limited information. and advice. 

NOTE: The two output lines (top line and 3rd from top) from the gas pod get merged at the tool before entering the instrument. I am not sure why it was plumbed this way back in 1995.

Regards,
Kevin

--
Kevin M. McPeak
Assistant Professor | LSU Dept. of Chemical Engineering
225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication

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