[labnetwork] Plumbing new gases in ICP-RIE gas pod

[Iulian Codreanu]

Hi Kevin,

I second Dennis' recommendation. I have the MFC bypass arrangement for 
flammable, pyrophoric, toxic, and corrosive gases.

Best,

Iulian

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu

On 1/23/2020 2:47 PM, Dennis Schweiger wrote:
> Kevin,
>
> good afternoon.  You have an interesting assortment of technologies in 
> your gas box, micro-fit, and the older TB7 weld hardware. Since your 
> two "new" gases are relatively inert, I would pick the simplest 
> install to make them active.  Typically the bypass arrangement you see 
> on a couple of the channels is for when you need to remove the MFC, 
> and it's plugged.  If you were using a reactive gas, the bypass gives 
> you a way to evacuate both ends of the MFC, making it "safe" to remove.
>
> DennisSchweiger
> University of Michigan/LNF
> Facilities
> 734.647.2055 Ofc
>
>
> On Thu, Jan 23, 2020 at 11:52 AM Kevin M McPeak <kmcpeak at lsu.edu 
> <mailto:kmcpeak at lsu.edu>> wrote:
>
>     Dear Colleagues,
>
>     Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford
>     ICP100 system. The gas pod (see attached photo) currently has the
>     following gases plumbed from top to bottom: O2, N2, CF4, and SF6.
>     Notice, the current CF4 and SF6 lines have additional valves and
>     plumbing.
>
>     When I add the C4F8 and CHF3 do you recommend I plumb them like
>     the O2 and N2 gases (filter -> MFC -> valve) are or do I need to
>     add the additional valves and plumbing like the SF6 and CF8 lines
>     are? We can do either but the SF6/CF4 method is a lot more money
>     and time. This is an old gas pod, circa 1995 and Oxford has
>     limited information. and advice.
>
>     NOTE: The two output lines (top line and 3rd from top) from the
>     gas pod get merged at the tool before entering the instrument. I
>     am not sure why it was plumbed this way back in 1995.
>
>     Regards,
>     Kevin
>
>     --
>     Kevin M. McPeak
>     Assistant Professor | LSU Dept. of Chemical Engineering
>     225-578-0058 | mcpeaklab.com <http://mcpeaklab.com> |
>     lsu.edu/nanofabrication <http://lsu.edu/nanofabrication>
>
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