[labnetwork] Savannah ALD GUI crash - empties the N2 cylinder

Youry Borisenkov yb2471 at columbia.edu
Mon Jan 27 16:13:37 EST 2020


Dear All,
We are experiencing a strange fault with our savannah ALD.
It was hard to catch but, when the Lab View GUI crashes or friezes (this
happens every once in a while and the system is in Idle mode), it just sets
the Nitrogen purge MFC to the max open position and empties the N2 cylinder
unless we are fast to respond.
Did any of you had such a problem? If so, what was the solution?

-- 
Thanks and Best Regards,
Youry Borisenkov
Cleanroom Process Engineer
Columbia University
530 W 120th Street Room 1017
New York, NY 10027
*Columbia Nano Initiative | Cleanroom*
<http://cni.columbia.edu/columbia-university-clean-room>
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