[labnetwork] laboratory sputter deposition equipment

[Aebersold,Julia W.]

Our Lesker PVD 75 fits all of your options, but ours is outfitted with a cryo rather than turbo.

Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of RIchard DeVito
Sent: Friday, July 17, 2020 9:46 AM
To: Guido Janssen - 3ME <G.C.A.M.Janssen at tudelft.nl>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] laboratory sputter deposition equipment

CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.
try PVD products

On Fri, Jul 17, 2020 at 8:51 AM Guido Janssen - 3ME <G.C.A.M.Janssen at tudelft.nl<mailto:G.C.A.M.Janssen at tudelft.nl>> wrote:
Dear colleagues

Here in Delft we are in the proces of replacing our 16 years old AJA sputter tool, used for proces development and materials science studies.
We’re looking for a system with three 2” targets in sputter down configuration able to handle small samples as well as 100 mm wafers. DC and RF, heated substrate holder with sample bias option, turbo pumped and equiped with a load lock.
Do you know of any supplier other than AJA that offers such a system?

Sincerely
Guido Janssen
TU Delft
g.c.a.m.janssen at tudelft.nl<mailto:g.c.a.m.janssen at tudelft.nl>
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