[labnetwork] laboratory sputter deposition equipment

[RIchard DeVito]

try PVD products

On Fri, Jul 17, 2020 at 8:51 AM Guido Janssen - 3ME <
G.C.A.M.Janssen at tudelft.nl> wrote:

> Dear colleagues
>
> Here in Delft we are in the proces of replacing our 16 years old AJA
> sputter tool, used for proces development and materials science studies.
> We’re looking for a system with three 2” targets in sputter down
> configuration able to handle small samples as well as 100 mm wafers. DC and
> RF, heated substrate holder with sample bias option, turbo pumped and
> equiped with a load lock.
> Do you know of any supplier other than AJA that offers such a system?
>
> Sincerely
> Guido Janssen
> TU Delft
> g.c.a.m.janssen at tudelft.nl
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