[labnetwork] laboratory sputter deposition equipment

[Joseph Palmer]

As do I.  We have 6 systems.

Joe

Sent from my iPad

> On Jul 17, 2020, at 4:04 PM, Soltanian, Saeid <saeid.soltanian at ubc.ca> wrote:
> 
> 
> I also recommend https://angstromengineering.com/
> I have it here and very happy with the performance.
> 
> Saeid 
> 
>> --
>> Saeid Soltanian, PhD
>> Research Associate, Manager
>> Centre for Flexible Electronics and Textiles (CFET)
>> University of British Columbia
>> 117-2355 East Mall, Vancouver, BC V6T 1Z4
>> Tel: +1-604-827-1573
>> Email: saeid.soltanian at ubc.ca
>> http://cfet.ubc.ca/
>>> On Jul 17, 2020, at 8:39 AM, Shimon Eliav <shimonel at savion.huji.ac.il> wrote:
>>> 
>> Hi Guido,
>> I recommend Angstrom Engineering: https://angstromengineering.com/
>> They are great.
>> Contact person: Mike Miller (Cc).
>> Regards,
>> Shimon
>> 
>> -----Original Message-----
>> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Guido Janssen - 3ME
>> Sent: Friday, 17 July 2020 11:30
>> To: labnetwork at mtl.mit.edu
>> Subject: [labnetwork] laboratory sputter deposition equipment
>> 
>> Dear colleagues
>> 
>> Here in Delft we are in the proces of replacing our 16 years old AJA sputter tool, used for proces development and materials science studies.
>> We’re looking for a system with three 2” targets in sputter down configuration able to handle small samples as well as 100 mm wafers. DC and RF, heated substrate holder with sample bias option, turbo pumped and equiped with a load lock. 
>> Do you know of any supplier other than AJA that offers such a system?
>> 
>> Sincerely
>> Guido Janssen
>> TU Delft
>> g.c.a.m.janssen at tudelft.nl
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