[labnetwork] RIE Lower Electrode Question

[Chang, Long]

Hi All,

The lower electrode to our RIE system has taken quite a bit of abuse over the decade, see photo. There are scratches and pits caused by wafer shards. There’s also a film of something (probably PTFE oil) in the middle.

Does anyone know how these scratches and pits might affect the Bosch Process? Any recommendations for cleaning this up?

Thanks,
Long
[cid:CEAD01E3-468C-431D-A3F3-56276537FAEC at serc.dhcp.e.uh.edu]
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