[labnetwork] Sputtering Plasma Characterization tools?

[abdelilah safir]

Dear Labnetwork team,
Has anyone had good experience characterizing plasma parameters? like
plasma density,
Energy distribution and ions and neutral currents within the sputtering
chamber?
I use ions assisted sputtering of oxides.

I do know that people use RFEA and LP and I read that Faraday cups are also
used by some researchers as well.
REFA is the best but it has a temperature limitation.

I appreciated any recommendation.

Best regards,
Abdelilah Safir
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