[labnetwork] Sputtering of MgF2

[Football]

I have the same question.  I don't know if there are compatibility problems
with other elements (mostly are metals in our sputter system).  Does it
cause hard-to-clean contaminations to the chamber, like small flakes, or
problems to the vacuum quality of the chamber? Does it have special
handling requirements? Any advice is greatly appreciated. Thanks and stay
healthy.


Fubo Rao, Ph.D.

Materials Research Laboratory

The Grainger College of Engineering
University of Illinois at Urbana-Champaign
104 S. Goodwin Ave. Urbana, IL 61801
Office: 217-244-6202
Email: frao at illinois.edu
<frao at illinois.edu%0b>


On Thu, Jun 8, 2017 at 2:51 PM <julia.aebersold at louisville.edu> wrote:

> I have a client that wants to sputter MgF2 in our processing chamber.  We
> do not have any experience with this material and wanted to ask folks if
> there were outgasing or contamination concerns.
>
>
> Cheers!
>
>
> Julia Aebersold, Ph.D.
>
> MNTC Cleanroom Manager
>
> University of Louisville
>
> 2210 South Brook Street
>
> Shumaker Research Building, Room 233
>
> Louisville, KY  40292
>
> (502) 852-1572
>
> http://louisville.edu/micronano/
>
>
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