[labnetwork] Sputtering of MgF2

[Aebersold,Julia W.]

Hi there!  Its been so long ago that I don't recall the details, but we have not had any issues with our e-beam system since then.


Cheers!


Julia Aebersold, Ph.D.

Manager, Micro/Nano Technology Center

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>


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To: Aebersold,Julia W. <julia.aebersold at louisville.edu>
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Subject: Re: [labnetwork] Sputtering of MgF2


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I have the same question.  I don't know if there are compatibility problems with other elements (mostly are metals in our sputter system).  Does it cause hard-to-clean contaminations to the chamber, like small flakes, or problems to the vacuum quality of the chamber? Does it have special handling requirements? Any advice is greatly appreciated. Thanks and stay healthy.


Fubo Rao, Ph.D.

Materials Research Laboratory

The Grainger College of Engineering
University of Illinois at Urbana-Champaign
104 S. Goodwin Ave. Urbana, IL 61801
Office: 217-244-6202
Email: frao at illinois.edu
<mailto:frao at illinois.edu%0b>


On Thu, Jun 8, 2017 at 2:51 PM <julia.aebersold at louisville.edu<mailto:julia.aebersold at louisville.edu>> wrote:

I have a client that wants to sputter MgF2 in our processing chamber.  We do not have any experience with this material and wanted to ask folks if there were outgasing or contamination concerns.


Cheers!


Julia Aebersold, Ph.D.

MNTC Cleanroom Manager

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>


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