[labnetwork] Sputtering of MgF2

[John Nash]

I usually ask these questions to our target vendor if our team lacks the knowledge about a particular material. Kurt Lesker, who we buy many of our targets through, has applications engineers that are quite knowledgeable about the majority of materials and compound materials. I am not knocking the other vendors, as I am sure they are knowledgeable as well.

Regards,

John C Nash
SMFL - Technician
Rochester Institute of Technology
Semiconductor & Microsystems Fabrication Laboratory
82 Lomb Memorial Dr.
Bldg. 17-2627
Rochester, NY 14623

585 478-3835 cell
john.nash at rit.edu<mailto:john.nash at rit.edu>
www.smfl.rit.edu<http://www.smfl.rit.edu>





From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Tim Gilheart
Sent: Thursday, June 11, 2020 3:13 PM
To: Aebersold,Julia W. <julia.aebersold at louisville.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Sputtering of MgF2

We also had a user depositing MgF2 routinely in our e-beam evaporator. Before letting them use this material, we completed a safety/process review together and confirmed that we didn’t anticipate any problems.

It did not subsequently create any special issues for us on our general purpose tool, which routinely supports dielectric and magnetic materials.

No idea about sputtering it; you may also want to consult your tool vendor in case they have a process expert who can help you.

Best of luck,

--
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager,
Shared Equipment Authority (SEA), Rice University
Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu<mailto:gilheart at rice.edu>


On Jun 8, 2020, at 4:55 PM, Aebersold,Julia W. <julia.aebersold at louisville.edu<mailto:julia.aebersold at louisville.edu>> wrote:

Hi there!  Its been so long ago that I don't recall the details, but we have not had any issues with our e-beam system since then.

Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
2210 South Brook Street
Shumaker Research Building, Room 233
Louisville, KY  40292
(502) 852-1572
http://louisville.edu/micronano/<http://louisville.edu/micronano>

________________________________
From: Football <yaofootball at gmail.com<mailto:yaofootball at gmail.com>>
Sent: Monday, June 8, 2020 5:03 PM
To: Aebersold,Julia W. <julia.aebersold at louisville.edu<mailto:julia.aebersold at louisville.edu>>
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu> <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: Re: [labnetwork] Sputtering of MgF2

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I have the same question.  I don't know if there are compatibility problems with other elements (mostly are metals in our sputter system).  Does it cause hard-to-clean contaminations to the chamber, like small flakes, or problems to the vacuum quality of the chamber? Does it have special handling requirements? Any advice is greatly appreciated. Thanks and stay healthy.


Fubo Rao, Ph.D.
Materials Research Laboratory
The Grainger College of Engineering
University of Illinois at Urbana-Champaign
104 S. Goodwin Ave. Urbana, IL 61801
Office: 217-244-6202
Email: frao at illinois.edu
<mailto:frao at illinois.edu%0b>


On Thu, Jun 8, 2017 at 2:51 PM <julia.aebersold at louisville.edu<mailto:julia.aebersold at louisville.edu>> wrote:
I have a client that wants to sputter MgF2 in our processing chamber.  We do not have any experience with this material and wanted to ask folks if there were outgasing or contamination concerns.

Cheers!

Julia Aebersold, Ph.D.
MNTC Cleanroom Manager
University of Louisville
2210 South Brook Street
Shumaker Research Building, Room 233
Louisville, KY  40292
(502) 852-1572
http://louisville.edu/micronano/<http://louisville.edu/micronano>

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