[labnetwork] Sputtering of MgF2

[Football]

Thank you all very much for sharing your experience and kind suggestions!
Stay well.

Regards,
Fubo Rao, Ph.D.

Materials Research Laboratory

The Grainger College of Engineering
University of Illinois at Urbana-Champaign
104 S. Goodwin Ave. Urbana, IL 61801
Office: 217-244-6202
Email: frao at illinois.edu
<frao at illinois.edu%0b>


On Fri, Jun 12, 2020 at 10:43 AM John Nash <jcn8004 at rit.edu> wrote:

> I usually ask these questions to our target vendor if our team lacks the
> knowledge about a particular material. Kurt Lesker, who we buy many of our
> targets through, has applications engineers that are quite knowledgeable
> about the majority of materials and compound materials. I am not knocking
> the other vendors, as I am sure they are knowledgeable as well.
>
>
>
> Regards,
>
>
>
> John C Nash
>
> SMFL - Technician
>
> Rochester Institute of Technology
>
> Semiconductor & Microsystems Fabrication Laboratory
>
> 82 Lomb Memorial Dr.
>
> Bldg. 17-2627
>
> Rochester, NY 14623
>
>
>
> 585 478-3835 cell
>
> john.nash at rit.edu
>
> www.smfl.rit.edu
>
>
>
>
>
>
>
>
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> *On
> Behalf Of *Tim Gilheart
> *Sent:* Thursday, June 11, 2020 3:13 PM
> *To:* Aebersold,Julia W. <julia.aebersold at louisville.edu>
> *Cc:* labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] Sputtering of MgF2
>
>
>
> We also had a user depositing MgF2 routinely in our e-beam evaporator.
> Before letting them use this material, we completed a safety/process review
> together and confirmed that we didn’t anticipate any problems.
>
>
>
> It did not subsequently create any special issues for us on our general
> purpose tool, which routinely supports dielectric and magnetic materials.
>
>
>
> No idea about sputtering it; you may also want to consult your tool vendor
> in case they have a process expert who can help you.
>
>
>
> Best of luck,
>
>
> --
> Tim Gilheart, Ph.D.
> Research Scientist - Nanofabrication Cleanroom Manager,
> Shared Equipment Authority (SEA), Rice University
> Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu
>
>
>
> On Jun 8, 2020, at 4:55 PM, Aebersold,Julia W. <
> julia.aebersold at louisville.edu> wrote:
>
>
>
> Hi there!  Its been so long ago that I don't recall the details, but we
> have not had any issues with our e-beam system since then.
>
>
>
> Cheers!
>
>
>
> Julia Aebersold, Ph.D.
>
> Manager, Micro/Nano Technology Center
>
> University of Louisville
>
> 2210 South Brook Street
>
> Shumaker Research Building, Room 233
>
> Louisville, KY  40292
>
> (502) 852-1572
>
> http://louisville.edu/micronano/
>
>
> ------------------------------
>
> *From:* Football <yaofootball at gmail.com>
> *Sent:* Monday, June 8, 2020 5:03 PM
> *To:* Aebersold,Julia W. <julia.aebersold at louisville.edu>
> *Cc:* labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
> *Subject:* Re: [labnetwork] Sputtering of MgF2
>
>
>
> *CAUTION:* This email originated from outside of our organization. Do not
> click links, open attachments, or respond unless you recognize the sender's
> email address and know the contents are safe.
>
> I have the same question.  I don't know if there are compatibility
> problems with other elements (mostly are metals in our sputter system).
> Does it cause hard-to-clean contaminations to the chamber, like small
> flakes, or problems to the vacuum quality of the chamber? Does it have
> special handling requirements? Any advice is greatly appreciated. Thanks
> and stay healthy.
>
>
>
>
>
> Fubo Rao, Ph.D.
>
> Materials Research Laboratory
>
> The Grainger College of Engineering
> University of Illinois at Urbana-Champaign
> 104 S. Goodwin Ave. Urbana, IL 61801
> Office: 217-244-6202
> Email: frao at illinois.edu
> <frao at illinois.edu%0b>
>
>
>
>
>
> On Thu, Jun 8, 2017 at 2:51 PM <julia.aebersold at louisville.edu> wrote:
>
> I have a client that wants to sputter MgF2 in our processing chamber.  We
> do not have any experience with this material and wanted to ask folks if
> there were outgasing or contamination concerns.
>
>
>
> Cheers!
>
>
>
> Julia Aebersold, Ph.D.
>
> MNTC Cleanroom Manager
>
> University of Louisville
>
> 2210 South Brook Street
>
> Shumaker Research Building, Room 233
>
> Louisville, KY  40292
>
> (502) 852-1572
>
> http://louisville.edu/micronano/
>
>
>
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