[labnetwork] Pedot pss in Cmos lab?

Robert Vandusen RobertVandusen at cunet.carleton.ca
Sun Nov 15 09:53:15 EST 2020


Hi all.
Hope everyone is staying safe.
The question about processing with Pedot Pss in our CMOS lab has came up again.
I was curious how others deal with this material in terms of cross contamination to cmos tools and processes.

Thanks
Rob
   Robert Vandusen
   Microfabrication Cleanlab Facility Manager
   Electronics Department
   Carleton University
   room: 4184 Mackenzie Building
   613-520-2600 ext 5761
   Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>

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