[labnetwork] Resist coating of tiny pieces

[Lino Eugene]

Dear colleagues,

We are having more users who work on tiny pieces to be coated with photo and e-beam resist.

I am thinking of different ways to coat these pieces:

·       custom chucks with a recess of the size of the chip

·       Si carrier wafer with recess etched by SF6 plasma

·       MicroSpray photoresist

I am wondering if you could share the techniques you use to get uniform coating on very small pieces.

Best,

Lino Eugene, P.Eng., Ph.D.,
Micro/nanofabrication process engineer
Quantum-Nano Fabrication and Characterization Facility
QNC 1611
University of Waterloo
200 University Avenue West
Waterloo, ON, Canada
N2L 3G1

Ph: +1 519-888-4567 #37788
Cell: +1 226-929-1685
Website: https://fab.qnc.uwaterloo.ca/


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