[labnetwork] Resist coating of tiny pieces

[Orad Reshef]

Dear Lino,

We need a little more context for what you consider a "tiny piece". I
routinely work with 1x1 cm pieces, and for those we use chucks that have an
o-ring about 0.5 cm in diameter.

I have colleagues who have worked with 1mm x 1mm square diced samples. They
mounted those on a large si handle wafer using double-sided carbon tape,
like you would use to mount a sample on an SEM stub.

Hope this helps,
Orad

Orad Reshef, PhD

Département de physique | Department of Physics
Université d’Ottawa | University of Ottawa
boydnlo.ca | reshef.ca


On Mon, Nov 16, 2020 at 11:44 AM Lino Eugene <lino.eugene at uwaterloo.ca>
wrote:

> Dear colleagues,
>
>
>
> We are having more users who work on tiny pieces to be coated with photo
> and e-beam resist.
>
>
>
> I am thinking of different ways to coat these pieces:
>
> ·       custom chucks with a recess of the size of the chip
>
> ·       Si carrier wafer with recess etched by SF6 plasma
>
> ·       MicroSpray photoresist
>
>
>
> I am wondering if you could share the techniques you use to get uniform
> coating on very small pieces.
>
>
>
> Best,
>
>
>
> *Lino Eugene, P.Eng., Ph.D.,*
>
> Micro/nanofabrication process engineer
>
> Quantum-Nano Fabrication and Characterization Facility
>
> QNC 1611
>
> University of Waterloo
>
> 200 University Avenue West
>
> Waterloo, ON, Canada
>
> N2L 3G1
>
>
>
> Ph: +1 519-888-4567 #37788
>
> Cell: +1 226-929-1685
>
> Website: https://fab.qnc.uwaterloo.ca/
>
>
>
>
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