[labnetwork] C4F8 being hard to find?

[Glenn Elaschuk]

Hello,

We purchase our C4F8 from Electronic Fluorocarbons.

Ryan Dwinal

Customer Sales & Service Manager

Elecronic Fluorocarbons, LLC

3266 Bergey Rd

Hatfield PA 19440

rdwinal at efgases.com

Mobile: 508-395-0371

On Wed, Nov 25, 2020 at 6:30 AM DeRose, Guy A. <derose at caltech.edu> wrote:

> Hello community,
>
>
>
> From the time we re-opened our cleanroom back in June through now, we have
> had challenges sourcing C4F8 (Halocarbon C318) gas for our plasma etch
> tools.  We have tried three different vendors, and the lead times have been
> unusually long.  Are there any gas suppliers that any of you have had good
> luck sourcing this gas within a couple of weeks?  I have been waiting for
> one cylinder to be shipped since October 5 and am still waiting.  We have
> been trying to get enough to have a spare on hand, but sourcing has been an
> issue to the point of running empty while waiting for a replacement.
>
>
>
> Thanks,
>
> Guy
>
>
>
> Guy DeRose, PhD, Member of the Professional Staff
>
> Associate Director of Technical Operations, Kavli Nanoscience Institute
>
> California Institute of Technology, Pasadena, CA USA
>
> (O) 1-626-395-3423 (M) 1-626-676-8529
>
> http://kni.caltech.edu
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>


-- 
Glenn Elaschuk, EET
Systems/Infrastructure Specialist.
University of Alberta - nanoFAB
W1-060 ECERF Building
9107-116 Street
Edmonton, AB.
Canada T6G 2V4                Ph. 587-879-1518

www.nanofab.ualberta.ca
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