[labnetwork] C4F8 being hard to find?

[DeRose, Guy A.]

Hello community,

From the time we re-opened our cleanroom back in June through now, we have had challenges sourcing C4F8 (Halocarbon C318) gas for our plasma etch tools.  We have tried three different vendors, and the lead times have been unusually long.  Are there any gas suppliers that any of you have had good luck sourcing this gas within a couple of weeks?  I have been waiting for one cylinder to be shipped since October 5 and am still waiting.  We have been trying to get enough to have a spare on hand, but sourcing has been an issue to the point of running empty while waiting for a replacement.

Thanks,
Guy

Guy DeRose, PhD, Member of the Professional Staff
Associate Director of Technical Operations, Kavli Nanoscience Institute
California Institute of Technology, Pasadena, CA USA
(O) 1-626-395-3423 (M) 1-626-676-8529
http://kni.caltech.edu
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