[labnetwork] looking for CF4 RIE
Felix Jaeckel
felix.jaeckel at wisc.edu
Tue Sep 1 15:07:15 EDT 2020
Hi everyone,
since our local RIE is currently down, we are looking for someone who could perform CF4 etching of SiN (~1um) for us on
a few 4" Si wafers.
Bonus would be if you had a SPTS Xactix E1 (or similar) XeF2 tool to perform an added etch step.
The wafers would come pre-patterned with photoresist (covering Cu/Mo/SiN/SiO2/Si).
If you are able to help, please contact me off-list with a rough idea of cost/compensation. We are hoping for a fairly
quick turn-around also.
Thank you!
Felix
--
Felix Jaeckel, Ph.D.
Associate Scientist
McCammon Astrophysics Lab
Physics Department
University of Wisconsin - Madison
1150 University Avenue
Madison, WI 53706-1390
608 265-8958
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