[labnetwork] looking for CF4 RIE

[Aebersold,Julia W.]

Felix, we can help you and we have both capabilities of CF4 connected to our RIE along with a Xactix XeF2 tool.

http://louisville.edu/micronano/equipment-capabilities

Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Felix Jaeckel
Sent: Tuesday, September 1, 2020 3:07 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] looking for CF4 RIE

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Hi everyone,

since our local RIE is currently down, we are looking for someone who could perform CF4 etching of SiN (~1um) for us on a few 4" Si wafers.

Bonus would be if you had a SPTS Xactix E1 (or similar) XeF2 tool to perform an added etch step.

The wafers would come pre-patterned with photoresist (covering Cu/Mo/SiN/SiO2/Si).

If you are able to help, please contact me off-list with a rough idea of cost/compensation. We are hoping for a fairly quick turn-around also.

Thank you!

Felix

--
Felix Jaeckel, Ph.D.
Associate Scientist
McCammon Astrophysics Lab
Physics Department
University of Wisconsin - Madison
1150 University Avenue
Madison, WI  53706-1390
608 265-8958


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