[labnetwork] Cleanroom structure

[Wing Leong CHUNG]

Dear all,

NFF of HKUST are planning to build a new cleanroom research facility. We want to know the pros and cons of a vertical structure (cleanroom with sub-fab)? Hope can give us some valuable suggestion.

May I have some examples of cleanroom with vertical structure as well.

Many Thank.
Jeff Chung

Senior Manager, NFF, HKUST
www.nff.ust.hk
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