[labnetwork] Cleanroom structure

[Abbie Gregg]

HI Wing Leong,
Nice to meet you via Labnetwork. Very exciting to build a new research facility at HKUST. I know Greg Raupp very well who used to work there between stints at ASU.
Use of a subfab can make the construction and eventual tool hookup much more expensive than a slab on grade or partial subfab type facility (which is also an option) . A full subfab set up on a Waffle Slab with raised access flooring, is not usually necessary for tools to support substrate sizes up to 6 inches or even 8 inches, whether wafers or other substrates. However, many modern production type tools for 200 mm and 300 mm are set up to facilitize the tools from below, using a subfab and raised access floor configuration.  These larger substrate tools have a tool footprint in the subfab of a size similar to the fab level footprint  configuration. So those will be most cost effective if facilitized with a subfab (a lower cost zone for the support equipment and utility distribution).
Decisions on fab level height, use of Raised Access Flooring or not (eg Popouts), Vibration criteria, gas distribution and HPM storage requirements and local building codes (such as building heights and depth below grade allowed) will also play into the optimum configuration along with the tool set.
We have evaluated these types of configurations for such University Nanofab facilities as
Duke FCIEMAS cleanroom.
MIT.nano
BRIDG/UCF
ASU Macrotechnology works
UC Berkeley
MTA in Vietnam
KAUST
U of Chicago WERC
USC Michelson Center for Convergent Bioscience

And many others.
We have lots of photos we can also share.
We would be happy to discuss further and you may contact me at the cell number below.
I am sure many of our colleagues on this network can chime in also!
Abbie Gregg
Chief Technology Officer
Office: (480) 446-8000 xt 107 | Direct: (480) 530-0403
Cell: (480) 577-5083
Email: agregg at amts.com<mailto:agregg at amts.com>
AM Technical Solutions,  1501 West Fountainhead Parkway, Suite 130 ,Tempe, AZ 85282

[cid:image001.png at 01D682AF.2D9D0080]
Please check out the full range of our services at:
Facebook<https://www.facebook.com/AMTechnicalSolutions> | Twitter<https://twitter.com/AMTechSol> | LinkedIn<http://www.linkedin.com/company/am-technical-solutions-inc> | www.amts.com<http://www.amts.com/>

CONFIDENTIALITY NOTICE:   All information contained in or attached to this email constitutes confidential information belonging to AM Technical Solutions, Inc., its affiliates and subsidiaries and/or its clients.  This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee(s) only.   All other uses or disclosures are strictly prohibited.  If the reader is not the intended recipient you are hereby notified that the perusal, copying or dissemination of this email is strictly prohibited. If you have received this communication in error, please notify the sender, and delete all copies of this message and its attachments immediately.
.

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Wing Leong CHUNG
Sent: Friday, September 4, 2020 6:29 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cleanroom structure

Dear all,

NFF of HKUST are planning to build a new cleanroom research facility. We want to know the pros and cons of a vertical structure (cleanroom with sub-fab)? Hope can give us some valuable suggestion.

May I have some examples of cleanroom with vertical structure as well.

Many Thank.
Jeff Chung

Senior Manager, NFF, HKUST
www.nff.ust.hk<http://www.nff.ust.hk>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200904/d24fd27f/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.png
Type: image/png
Size: 7737 bytes
Desc: image001.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200904/d24fd27f/attachment.png>