[labnetwork] Dow ebeam resist delays

[Mark K Mondol]

Franklin:


This has been an ongoing problem for all ebeam facilities. Dow has been an unreliable source for >1year in my experience.

Several of us have been working with DisChem to supply HSQ in 2%, 4%, 6% and other dilutions in MIBK. The do this with dry HSQ from AQM (Applied Quantum Materials) in Canada.  EM Resists is doing something similar and they are based in England. I and others have tested the resist and it is almost identical to the product from Dow.


As I understand it DiscChem can ship within a couple of weeks or less and often makes the dilutions up to order. As DisChem gets dry material from another supplier the cost is based on the dilution of HSQ, prices are a bit higher than Dow, depending on when you last checked the Dow prices and whether you need 2%, 4% or 6%.




Regards,

Mark K Mondol



----------------------------------------------------------------------------------
Mark K Mondol
Assistant Director NanoStructures Laboratory
And
Facility Manager Scanning Electron Beam Lithography Facility
Bldg 36 Room 229
 mondol at mit.edu
office - 617-253-9617
cell - 617-224-8756
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Franklin Monzon <fm at fmconsultingresearch.com>
Sent: Tuesday, September 8, 2020 6:47 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Dow ebeam resist delays

Hi All,

We at HRL are having enormous difficulty with procurement of ebeam resist from Dow, and I wonder if anyone else is having this problem. Specifically, we are trying to acquire XR-1541. We use 2%, 4%, and 6% formulations but are having special problems with 2%.

Lead times have increased generally in 2020 (perhaps for some good reasons!), but the distributors we work with now cannot even get a firm timeline from Dow. We told them we are willing to order larger quantities than usual but have been informed that that won't help.

The shortage is starting to cause delays on key government programs, so I'd very much appreciate any insight from this group.

Thanks for your advice!
FM
*********************************
Franklin Monzon
Director, Microfabrication Technology Laboratory
HRL Laboratories


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