[labnetwork] Dow ebeam resist delays

[Michael Rooks]

An alternative source for HSQ is

discheminc.com

XR1541 is Dow's brand name for HSQ.
Dischem's product is pretty much a drop-in replacement, except for having
to bake it at 120C after spinning.

EMResist in the UK also sells HSQ, but I have not tried it.


--------------------------------
Michael Rooks
nano.yale.edu


On Tue, Sep 8, 2020 at 7:40 PM Franklin Monzon <fm at fmconsultingresearch.com>
wrote:

> Hi All,
>
> We at HRL are having enormous difficulty with procurement of ebeam resist
> from Dow, and I wonder if anyone else is having this problem. Specifically,
> we are trying to acquire XR-1541. We use 2%, 4%, and 6% formulations but
> are having special problems with 2%.
>
> Lead times have increased generally in 2020 (perhaps for some good
> reasons!), but the distributors we work with now cannot even get a firm
> timeline from Dow. We told them we are willing to order larger quantities
> than usual but have been informed that that won't help.
>
> The shortage is starting to cause delays on key government programs, so
> I'd very much appreciate any insight from this group.
>
> Thanks for your advice!
> FM
> *********************************
> Franklin Monzon
> Director, Microfabrication Technology Laboratory
> HRL Laboratories
>
>
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