[labnetwork] STS ASE DRIE chiller

[Beall, James A. (Fed)]

Our SPTS Pegasus uses Galden HT135 in an SMC HRZ chiller for platen cooling.

Jim

Jim Beall
NIST Boulder Microfabrication Facility

On Apr 2, 2021, at 1:01 PM, Patrick Roman <proma016 at fiu.edu<mailto:proma016 at fiu.edu>> wrote:

Greetings!  Our Drie system uses a chiller with distilled water for
the chuck cooling.  Can anyone recommend a better cooling fluid for 5C
processes, eg silicon etching?

Patrick Roman

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