[labnetwork] STS ASE DRIE chiller

[Bruce Tolleson]

Dear Labnetwork,
Our STS ASE uses an Affinity RWA-12T-CE55CBD4 chiller with an external D.I. cartridge to keep the conductivity low. It works well for us.
Thank you,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Beall, James A. (Fed)
Sent: Friday, April 2, 2021 3:54 PM
To: Patrick Roman <proma016 at fiu.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] STS ASE DRIE chiller

Our SPTS Pegasus uses Galden HT135 in an SMC HRZ chiller for platen cooling.


Jim


Jim Beall
NIST Boulder Microfabrication Facility



On Apr 2, 2021, at 1:01 PM, Patrick Roman <proma016 at fiu.edu<mailto:proma016 at fiu.edu>> wrote:

Greetings!  Our Drie system uses a chiller with distilled water for
the chuck cooling.  Can anyone recommend a better cooling fluid for 5C
processes, eg silicon etching?

Patrick Roman

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