[labnetwork] Black Silicon

[Ferraguto, Thomas S]

Colleagues,

I've been doing some deeper than usual silicon etch on my Oxford ICP 380 in Cryo mode using and SiO2 mask (SF6 & O2)

I've been getting what I believe to be a "Black silicon" artifact, and would either like to NOT get it or remove it.

If anyone has thoughts or could point me in the right direction , I'd appreciate it.

Best Regards

Tom


Thomas S. Ferraguto
Saab ETIC Nanofabrication Laboratory Director
Saab ETIC Building Director
1 University Avenue
Lowell MA 01854
Mobile 617-755-0910
Land 978-934-1809
Fax 978-934-1014





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