[labnetwork] Black Silicon

[Fouad Karouta]

Hi Tom,

Black Si is reported in literature and is usually obtained when etching
with SF6+O2.
Changing the O2 ratio may help.
I do not have experience with cryo etch but I did some pillars etching in
Si. If required we can discuss details offline.

Best regards
Fouad Karouta

On Sat, 10 Apr 2021 at 7:15 am, Ferraguto, Thomas S <
Thomas_Ferraguto at uml.edu> wrote:

> Colleagues,
>
>
>
> I’ve been doing some deeper than usual silicon etch on my Oxford ICP 380
> in Cryo mode using and SiO2 mask (SF6 & O2)
>
>
>
> I’ve been getting what I believe to be a “Black silicon” artifact, and
> would either like to NOT get it or remove it.
>
>
>
> If anyone has thoughts or could point me in the right direction , I’d
> appreciate it.
>
>
>
> Best Regards
>
>
>
> <https://www.google.com/maps/search/1+University+Avenue+%0D%0A+Lowell+MA+01854?entry=gmail&source=g>
>
> Tom
>
>
>
>
>
> Thomas S. Ferraguto
>
> Saab ETIC Nanofabrication Laboratory Director
>
> Saab ETIC Building Director
>
> 1 University Avenue
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