[labnetwork] ZEP worth it?

[Michael Rooks]

The dose depends a lot on the developer. It's a tradeoff between resolution
and sensitivity. You could develop ZEP in IPA/water or cold xylene for very
high resolution. But then the sensitivity is closer to that of PMMA. We use
CSAR instead of ZEP. It's the same polymer but a lot less expensive. Shelf
life is very long - similar to PMMA. We still use a lot of PMMA, which is
perfectly fine for liftoff.

--------------------------------
Michael Rooks
nano.yale.edu


On Thu, Apr 29, 2021 at 11:47 AM Chang, Long <lvchang at central.uh.edu> wrote:

> Hi Guys,
>
> I have no experience with ZEP, but the data sheet suggest a critical dose
> of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP
> and under what conditions is it worth the cost? Does it last forever in
> storage like PMMA?
>
> Thanks,
> Long
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20210429/486ca6c4/attachment.html>