[labnetwork] ZEP worth it?

[Mark K Mondol]

Long:


I would estimate the dose ratio between PMMA and ZEP to be closer to 4 or 5 to 1.  ZEP definitely has a shelf life, 1-2 years, maybe longer. It has much better etch resistance than PMMA.  It is expensive.


CSAR from All Resists is very similar and much cheaper, it requires about 20% more dose than ZEP.


Regards,


Mark K Mondol


----------------------------------------------------------------------------------
Mark K Mondol
Assistant Director NanoStructures Laboratory
And
Facility Manager Scanning Electron Beam Lithography Facility
Bldg 36 Room 229
 mondol at mit.edu
office - 617-253-9617
cell - 617-224-8756
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Chang, Long <lvchang at Central.UH.EDU>
Sent: Thursday, April 29, 2021 10:28 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ZEP worth it?

Hi Guys,

I have no experience with ZEP, but the data sheet suggest a critical dose of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP and under what conditions is it worth the cost? Does it last forever in storage like PMMA?

Thanks,
Long

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