[labnetwork] ZEP worth it?

[Gerald Lopez]

Hey, Long -

Many of us in the EBL community have not had issues with ZEP expiring. If
the bottle cap is not secured properly, your spin curves may simply be off
over time. This can be remedied by adding more solvent (anisole).
Alternatively, there is CSAR 62 by AllResist <http://allresist.de/>; they
will actually have a booth at the EIPBN virtual exhibition hall from June
1-4, 2021 (www.eipbn.org) The performance is about the same as ZEP in terms
of dose and etch-selectivity, and I believe is cheaper.

Cheers,
Gerald-

Gerald G. Lopez, Ph.D. (he/him/his)
Director of Business Development
University of Pennsylvania
Singh Center for Nanotechnology
3205 Walnut Street
Philadelphia, PA 19104
https://nano.upenn.edu
+1-215-573-4041



On Thu, Apr 29, 2021 at 11:54 AM Chang, Long <lvchang at central.uh.edu> wrote:

> Hi Guys,
>
> I have no experience with ZEP, but the data sheet suggest a critical dose
> of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP
> and under what conditions is it worth the cost? Does it last forever in
> storage like PMMA?
>
> Thanks,
> Long
>
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