[labnetwork] Cleanroom elevated floor

[Owain Clark]

We run a raised floor. So far we have not had many problems moving tools. For the heaviest we have sometimes reinforced with steel sheets during movement and then when in place we use some small steel plates to spread load per contact point. The Nikon scanner install did require improved structural engineering for its floor area, which was not cheap. This was not part of the original build.

Yes it does get filthy down there, I wish I could say we cleaned every 3 months but that would not strictly be true. It can help with the odd cooling water flood by routing it straight to drain. Touch wood we have not had that problem for a long time. Nearly all of our services run in it and there is no great issue there, apart from sometimes the requirement for confined space training can be an irritation, especially for any gas line welding.

I prefer not to hide things there, they have a habit of becoming forgotten and staying there too long. We used to have some backing pumps down there, but the hassle of lifting them out for servicing was not worth the space/vibration savings.

Owain.

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Morrison, Richard H., Jr
Sent: 13 December 2021 13:07
To: shimonel at savion.huji.ac.il; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Cleanroom elevated floor

CAUTION: This e-mail originated outside the University of Southampton.
I would say that all the 200mm and 300mm fab in the world use a raised floor.  While under construction the space should be cleaned every day and since it is clean room construction every going into the space is wiped down so it is fairly clean.

The raised floor allows a clutter free cleanroom, from piping and wires because all the services run in the floor space, very eye pleasing space. Then once per qtr you lift up the floor tiles and send in a person to vacuum and cleanup. All the debris collects on the floor and any flat surfaces, very easy to pickup and clean. Another benefit is that the air moves straight down from the ceiling reducing eddy currents and providing almost laminar air flow.

Rick


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461





From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Shimon Eliav
Sent: Monday, December 13, 2021 6:54 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cleanroom elevated floor

Hello Everybody,

We are designing a new cleanroom and I think to use an elevated floor to accommodate part of the utilities and serve as air return path to the chase. The air-conditioning designers didn't like the idea: they argue it is expensive and difficult to clean.
What is your experience with this? How clean that space below the elevated floor?

Thanks in advance for your input.

Regards,

Shimon
The Hebrew University of Jerusalem
The Unit for Nano Fabrication - UNF
Jerusalem - ISRAEL
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