[labnetwork] Cleanroom elevated floor

[Stephen Howe]

FYI If you are moving tools over a raised floor, it's much easier to
use thick plastic sheets rather than steel ones. They are not so heavy
to be carrying around.

On Mon, 2021-12-13 at 19:55 +0000, Owain Clark wrote:
> 
> 
> We run a raised floor. So far we have not had many problems moving
> tools. For the heaviest we have sometimes reinforced with steel
> sheets during movement and then when in place we use some small
>  steel plates to spread load per contact point. The Nikon scanner
> install did require improved structural engineering for its floor
> area, which was not cheap. This was not part of the original build.
>  
> Yes it does get filthy down there, I wish I could say we cleaned
> every 3 months but that would not strictly be true. It can help with
> the odd cooling water flood by routing it straight to drain.
>  Touch wood we have not had that problem for a long time. Nearly all
> of our services run in it and there is no great issue there, apart
> from sometimes the requirement for confined space training can be an
> irritation, especially for any gas line welding.
> 
>  
> I prefer not to hide things there, they have a habit of becoming
> forgotten and staying there too long. We used to have some backing
> pumps down there, but the hassle of lifting them out for servicing
>  was not worth the space/vibration savings. 
>  
> Owain.
>  
> 
> 
> From: labnetwork <labnetwork-bounces at mtl.mit.edu>
> On Behalf Of Morrison, Richard H., Jr
> 
> Sent: 13 December 2021 13:07
> 
> To: shimonel at savion.huji.ac.il; labnetwork at mtl.mit.edu
> 
> Subject: Re: [labnetwork] Cleanroom elevated floor
> 
> 
>  
> 
> 
> CAUTION: This e-mail
>  originated outside the University of Southampton. 
> 
> 
> 
> I would say that all the 200mm and 300mm fab in the world use a
> raised floor.  While under construction the space should be cleaned
> every day and since it is clean room construction every going into
>  the space is wiped down so it is fairly clean.
>  
> The raised floor allows a clutter free cleanroom, from piping and
> wires because all the services run in the floor space, very eye
> pleasing space. Then once per qtr you lift up the floor tiles and
>  send in a person to vacuum and cleanup. All the debris collects on
> the floor and any flat surfaces, very easy to pickup and clean.
> Another benefit is that the air moves straight down from the ceiling
> reducing eddy currents and providing almost laminar air
>  flow.  
>  
> Rick
>  
>  
> Richard Morrison
> PMTS
> Draper Laboratory
> 555 Technology Square
> Cambridge Ma  02139
> Office: 617-258-3420
> Cell: 508-930-3461
>  
>  
>  
>  
>  
> 
> 
> From: labnetwork <labnetwork-bounces at mtl.mit.edu>
> On Behalf Of Shimon Eliav
> 
> Sent: Monday, December 13, 2021 6:54 AM
> 
> To: labnetwork at mtl.mit.edu
> 
> Subject: [labnetwork] Cleanroom elevated floor
> 
> 
>  
> Hello Everybody,
>  
> We are designing a new cleanroom and I think to use an elevated floor
> to accommodate part of the utilities and serve as air return path to
> the chase. The air-conditioning designers didn’t like the idea: they
> argue it
>  is expensive and difficult to clean.
> What is your experience with this? How clean that space below the
> elevated floor?
>  
> Thanks in advance for your input.
>  
> Regards,
>  
> Shimon
> The Hebrew University of Jerusalem
> The Unit for Nano Fabrication - UNF
> Jerusalem - ISRAEL
> 
> 
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