[labnetwork] Pump for load lock on ASM Polygon 8200 Cluster tool

[Sandra Malhotra]

Howdy All,
We are having issues with a scroll pump for the load lock on an ASM Polygon
8200 Cluster tool. Does anyone have a recommendation for a better type of
pump and model to use? I understand a pump capable of 16 cfm that can
maintain 1 - 3 T should do the trick.

Thanks!

-- 

*Sandra G. Malhotra, Ph.D.*  |  Technical Lab Manager

AggieFab Nanofabrication Facility
Department of Electrical & Computer Engineering, College of Engineering |
Texas A&M University
3253 TAMU | College Station, TX 77843
ph: 979.845.3199  |  s <hprichard at tamu.edu>andra.malhotra at tamu.edu
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*TEXAS A&M UNIVERSITY* | FEARLESS on Every Front
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