[labnetwork] Pump for load lock on ASM Polygon 8200 Cluster tool
Jeff Hawks
jeffhawks at verizon.net
Sat Feb 13 09:22:44 EST 2021
Hi Sandra,
Most scroll pump manufactures sell tip seal replacement kits along with replacement procedures on YouTube. I believe they recommend annual tip seal maintenance.
Best regards,
Jeff Hawks
Hawks Technical Services LLC.
2715 Swamp Creek Rd.
Green Lane, PA. 18054
C 215-872-0944
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Sandra Malhotra
Sent: Friday, February 12, 2021 4:25 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Pump for load lock on ASM Polygon 8200 Cluster tool
Howdy All,
We are having issues with a scroll pump for the load lock on an ASM Polygon 8200 Cluster tool. Does anyone have a recommendation for a better type of pump and model to use? I understand a pump capable of 16 cfm that can maintain 1 - 3 T should do the trick.
Thanks!
--
Sandra G. Malhotra, Ph.D. | Technical Lab Manager
AggieFab Nanofabrication Facility
Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University
3253 TAMU | College Station, TX 77843
ph: 979.845.3199 | <mailto:hprichard at tamu.edu> sandra.malhotra at tamu.edu
- - - - - - - - - - - - - - - - - - - - - - - -
TEXAS A&M UNIVERSITY | FEARLESS on Every Front
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