[labnetwork] Pump for load lock on ASM Polygon 8200 Cluster tool

[Morrison, Richard H., Jr]

Hi everyone,

Here at Draper we have removed all our scroll pumps, because they are not meant to be on 24/7 with EBARA EV-A. this is a great small pump package with great reliability.

Rick



Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Sandra Malhotra
Sent: Friday, February 12, 2021 4:25 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Pump for load lock on ASM Polygon 8200 Cluster tool

Howdy All,
We are having issues with a scroll pump for the load lock on an ASM Polygon 8200 Cluster tool. Does anyone have a recommendation for a better type of pump and model to use? I understand a pump capable of 16 cfm that can maintain 1 - 3 T should do the trick.

Thanks!

--
Sandra G. Malhotra, Ph.D.  |  Technical Lab Manager
AggieFab Nanofabrication Facility
Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University
3253 TAMU | College Station, TX 77843
ph: 979.845.3199  |  s<mailto:hprichard at tamu.edu>andra.malhotra at tamu.edu<mailto:andra.malhotra at tamu.edu>
- - - - - - - - - - - - - - - - - - - - - - - -
TEXAS A&M UNIVERSITY | FEARLESS on Every Front
________________________________
Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
________________________________
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20210215/d2ceb9ed/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: EBARA EV-A Dry Pump Brochure.pdf
Type: application/pdf
Size: 838794 bytes
Desc: EBARA EV-A Dry Pump Brochure.pdf
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20210215/d2ceb9ed/attachment.pdf>