[labnetwork] Kanto Chemical BOSE IGZO etchant

Chong Lee chonglee at mit.edu
Wed Feb 17 11:54:03 EST 2021


I am new to this email list, let me know if this is appropriate to ask:

Does anyone know if above etchant will attack common metals like Al and Mo?  Where would I look for data or compatibility chart?

Has anyone used it at MTL before?

                              Chong

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