[labnetwork] On-line teaching reference for simple microfabrication

[James C. Sturm]

I'm looking for a simple straightforward on-line teaching reference for simple microfabrication with clear schematic step by step figures.

i.                     How you can use photolithography to pattern a selective etch, or for liftoff,

ii.                   Some figures and qualitative description of some different thin film formation or deposition methods

iii.                  A few simple integrated processes to make a device of some sort.
I'm sure they are out there.
Thanks, Jim Sturm

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